Abstract

This entry describes the common chemical vapor deposition techniques to produce (ultra) nanocrystalline diamond (UNCD/NCD) coatings and discusses the associated mechanisms including the roles of hydrogen and argon in the processes. UNCD/NCD coatings are commonly doped with boron and nitrogen, and the corresponding electronic, electrochemical, and optical properties are discussed. The surface properties of the materials can be tailored using different surface modification techniques, and the use of UNCD/NCD coatings in micro-electromechanical systems and electron emission devices is described.