Abstract

Scanning probe microscopy (SPM) is playing a more and more important role in characterizing materials at micro-/nanoscale. Based on the similar fundamental principle of using a probe to physically scan the surface of materials to extract desired signals ranging from morphology, piezoelectricity and ferroelectricity, the SPM family consists of many different techniques. Here we briefly reviewed the development history, applications, challenges and prospect of high-temperature SPM (HTSPM), with a special focus on high-temperature application at micro-/nanoscale. HTSPM is a rising experimental method that is being used for studying the temperature-dependent mechanical properties as well as the surface oxidation of materials. Applications such as surface characterization and surface topography evolution, mechanism study on small-scale oxidation as well as stress/strain measurement are summarized. The limitations and current issues that HTSPM is facing, as well as the potential applications beyond high-temperature oxidation and surface evolution study are also discussed to provide an overview of this technique.