Abstract

The chapter presents short characteristic of TXRF spectrometric method. There are formulated characteristic demands to units comprising the TXRF facility and to material objects studied by the method. TXRF measurements peculiarities discussion showed that the radiation density of X-ray beam exciting the characteristic radiation fluorescence yield is the critical parameter of the method. Because the planar X-ray waveguide-resonator is featured by emergent beam-enhanced radiation density, it is the best former of TXRF spectrometry exciting beam. The work presents experimental results obtained by use of conventional TXRF facility equipped by waveguide-resonators with simplest and modified designs. These results were used for the creation of the compact TXRF cell built on the basis of waveguide-resonance-modified constructions. The cell had demonstrated very high analytical parameters. Some attention was devoted to elaborate the cell for X-ray fluorescence analysis of gas mixtures in the flowing regime with the use of specific design waveguide-resonator. There are described TXRF analysis development directions through the properties improving of waveguide-resonance units. The chapter is crowned by presentation of new experimental method for the trace element analysis of material surface layers by registration of X-ray characteristic fluorescence yield excited by high-energy proton beams in conditions of the specific design waveguide-resonator application.