ABSTRACT

Semiconductor materials and devices play a major role in science and technology of modern society. Historically, there would neither be microelectronic technique and industry without the development of silicon material and an integrated circuit, nor optical communication, mobile communication, and digital high-speed information network technology without the development of compound semiconductor materials such as GaAs and InP. Today, driven by the demand from highly advanced science and technology, the semiconductor material system has evolved into a new era of the third generation, represented by III-nitride wide gap semiconductors which have become one of the predominant areas of modern semiconductor science and technology.