ABSTRACT
Over the last 20 years, great advancements have been made in nitride-based devices. The achievement can be credited to the development of material growth, as well as the innovation of device fabrication technologies. Among those nitride devices, GaN-based LED is the most mature product, which has been widely used in human life. This chapter will focus on the device fabrication process of GaN-based LEDs in the aspect of LED structure and related key technologies.
