ABSTRACT

Vacuum technology has enormous impact on human life in many aspects and fields, such as metallurgy, material development and production, food and electronic industry, microelectronics, device fabrication, physics, materials science, space science, engineering, chemistry, technology of low temperature, pharmaceutical industry, and biology. All decorative coatings used in jewelries and various daily products—including shiny decorative papers, the surface finish of watches, and light fixtures—are made using vacuum technological processes. Vacuum analytical techniques and vacuum technologies are pillars of the technological processes, material synthesis, deposition, and material analyses—all of which are used in the development of novel materials, increasing the value of industrial products, controlling the technological processes, and ensuring the high product quality. Based on physical models and calculated examples, the book provides a deeper look inside the vacuum physics and technology.

section I|478 pages

Physics of Low Pressures

chapter 1|27 pages

Fundamental Quantities in Vacuum Physics

chapter 3|71 pages

Thermodynamics of Gases at Low Pressures

chapter 4|23 pages

Real Gases

chapter 6|39 pages

Molecular Collisions

chapter 7|111 pages

Gas Flow at Vacuum Conditions

chapter 8|58 pages

Sorption

chapter 9|10 pages

Pumping Vacuum Systems

section II|160 pages

Vacuum Production

chapter 10|3 pages

Categorization of Vacuum Pumps

chapter 11|37 pages

Mechanical Displacement Pumps

chapter 12|21 pages

Dry Displacement Pumps

chapter 13|19 pages

Mechanical Kinetic Pumps

chapter 14|30 pages

Kinetic Propellant Pumps and Accessories

chapter 15|44 pages

Capture Pumps

section III|296 pages

Low Pressure Measurements

chapter 17|26 pages

Force Gauges with Manometric Liquids

chapter 19|18 pages

Force Gauges with Solid Sensing Elements

chapter 20|25 pages

Viscosity Molecular Gauges

chapter 21|29 pages

Vacuum Thermal Gauges

chapter 22|32 pages

Ionization Gauges with Hot Filaments

chapter 23|15 pages

Electric Discharge Vacuum Gauges

chapter 24|7 pages

Vacuum Gauges with Radioactive Emitters

chapter 27|14 pages

Gas Flow Measurements and Controls

chapter 28|10 pages

Leak Detection