Laser-Induced Forward Transfer

Authored by: Alexandra Palla Papavlu , Thomas Lippert

Handbook of Laser Technology and Applications

Print publication date:  June  2021
Online publication date:  June  2021

Print ISBN: 9781138033320
eBook ISBN: 9781315310855
Adobe ISBN:

10.1201/9781315310855-13

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Abstract

Nowadays the field of electronics, in particular the fabrication of integrated circuits, micro- and nanodevices, is dominated by various microfabrication processes, in particular by lithography technologies. These technologies are used to fabricate different-sized patterns, from the nanoscale, i.e. from few nanometres, to the mesoscale, i.e. micrometres to millimetres, which ultimately may be arranged in various architectures to create complex structures.

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