Nanoelectronics Lithography

Authored by: Stephen. Knight , Vivek M. Prabhu , John H. Burnett , James Alexander. Liddle , Christopher L. Soles , Alain C. Diebold

6 Handbook of Nanophysics

Print publication date:  September  2010
Online publication date:  September  2010

Print ISBN: 9781420075502
eBook ISBN: 9781420075519
Adobe ISBN:

10.1201/9781420075519-23

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Abstract

The modern integrated circuit (IC), comprising memory, logic processors and analog function devices, are multicomponent and multilevel nanostructures prepared by a series of patterning and pattern-transfer steps. Figure 19.1 shows the cross-sectional hierarchical structure that starts from the smallest feature, the transistor, to dielectrics and metal contacts that are each well defined and must precisely overlay the previous layer. This three-dimensional nanoelectronics structure is manufactured by a rapid patterning process called lithography.

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