General Comments

Authored by: David J. Whitehouse

Handbook of Surface and Nanometrology

Print publication date:  December  2010
Online publication date:  December  2010

Print ISBN: 9781420082012
eBook ISBN: 9781420082029
Adobe ISBN:

10.1201/b10415-10

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Abstract

Surface metrology is developing rapidly. In addition to being an essential part of engineering, it is taking on an important role in nanotechnology. However, the future requirements for the two disciplines are different. In engineering, traditional applications are mainly in tribology in which often two surfaces are involved, although many single-body applications such as optical scatter are also important. The scale of size of the workpiece is usually at the macro scale and the features such as the roughness is in the micron or submicron range. Usually it is the height information of the surface that is considered most relevant to performance. Also, the surfaces often have shapes due to rotational and other dynamic requirements. These traditional characteristics are being partly supplanted because of the introduction of surfaces which have a lateral structure such as grooves or dimples, rather than roughness, and a form which is non-Euclidean, i.e., free-form which can be of very complex shape rather than flat or round.

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