ABSTRACT
Semiconductor technology computer-aided design, or TCAD, typically refers to the use of computer simulations to develop and optimize semiconductor processing technologies, and the resulting semiconductor devices, typically transistors. Commercial TCAD began with formation of the company Technology Modeling Associates (TMA) in 1979, which is now part of Synopsys. The company was cofounded by Professor Bob Dutton at Stanford University, based on the research of his group, represented by two famous computer programs: Stanford University Process Engineering Models (SUPREM) for process TCAD and PoIsson and Continuity Equation Solver (PISCES) for device TCAD. PISCES became Medici in TMA’s offerings. These two programs were also commercialized by Silvaco, as ATHENA and ATLAS. A third TCAD company, Integrated System Engineering (ISE), was founded in 1993, offering DIOS and DESSIS. ISE was later acquired by Synopsys. At present, Synopsys and Silvaco are the two primary TCAD vendors.
