ABSTRACT

The integration of carbon nanotubes (CNTs) with micro-electromechanical systems (MEMS) or nano-electromechanical systems (NEMS) has attracted increasing interest over the last decade [1–7]. Recent semiconductor advancements further demonstrate the feasibility of using CNTs to construct nano-devices [3–7]. The possibility of combining CNTs with on-chip integrated circuits (ICs) and MEMS enables many applications of CNTs in devices, including physical, chemical, and biological sensors, as well as nanotube-based transistors. Combining the three technologies on a single platform will allow for true integration of micro–nano systems. CNTs with their huge surface-to-volume ratio give ultra-sensitive sensors, ICs/CMOS provide signal processing capability, and MEMS give actuation opportunities as well as further sensor options.