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Semiconductor Equipment and Materials International Interface and Communication Standards

An Overview with Case Studies

Authored by: Kiah Mok Goh , Lay Siong Goh , Geok Hong Phua , Aik Meng Fong , Yan Guan Lim , Ke Yi , Oo Tin

Industrial Communication Technology Handbook

Print publication date:  August  2014
Online publication date:  August  2014

Print ISBN: 9781482207323
eBook ISBN: 9781482207330
Adobe ISBN:

10.1201/b17365-80

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Abstract

Semiconductor Equipment and Materials International (SEMI), founded in the United States in 1970, is a global industry association with a worldwide membership of companies, representing semiconductor-related industries. SEMI has 26 subcommittees that include, among others, the subcommittees for Automated Test Equipment, Environment, Health and Safety, and Information and Control.

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