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Material or Process Book or Chapter Title Author or Editor Publication dates

Optical Materials

Microstructuring Surfaces with Off-Electrode Plasma

Authored by: Nikolay L. Kazanskiy , Vsevolod A. Kolpakov

Print publication date:  March  2017
Online publication date:  March  2017

Print ISBN: 9781138197282
eBook ISBN: 9781315279930
Adobe ISBN:

10.1201/b21918
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Book description

This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.

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