Ellipsometry-Based Humidity Sensors

Authored by: Ghenadii Korotcenkov

Handbook of Humidity Measurement

Print publication date:  March  2018
Online publication date:  March  2018

Print ISBN: 9781138300217
eBook ISBN: 9780203731956
Adobe ISBN:


 Download Chapter



This chapter gives a brief description of ellipsometry and its use for developing humidity sensors. Ellipsometry is a noninvasive optical measurement technique. It is known for its ability to determine thicknesses and dielectric functions of thin layers with very high accuracy, thereby providing access to fundamental physical parameters of the sample. It was shown that the ability to determine average monolayer properties gives great opportunities for studying the processes of absorption on the surface of sensing materials, and thus to judge about the humidity change of the environment. However, it must be recognized that this method is not simple and requires careful measurements and calculations, and therefore is more suitable for the study of the properties of surfaces and thin films, than for practical use as a tool for determining the humidity of the air. Examples of such applications of ellipsometry are discussed in this chapter. For example, it was shown that this method, Atmospheric Ellipsometry Porosimetry (EPA), can be used for the pore characterization of studied films. This is especially important for humidity sensors, because of their parameters are largely controlled by the pore size in the humidity-sensitive materials

Search for more...
Back to top

Use of cookies on this website

We are using cookies to provide statistics that help us give you the best experience of our site. You can find out more in our Privacy Policy. By continuing to use the site you are agreeing to our use of cookies.