ABSTRACT

Silicon nanostructures have played an important role in the development of the semiconductor industry. They have proved to be promising building blocks for devices in the fields of optoelectronics, energy conversion, nanoelectronics, energy storage, and bio (chemical) sensors [1]. Silicon nanopost arrays have aroused great attention, owing to their reproducible and facile fabrication process, and adjustable structure parameters. Attributed to the silicon nanopost arrays’ efficient light trapping assisted by the interactions of light within the space between the posts, they exhibit increased light-harvesting properties in contrast to flat surfaces, which makes them ideal for solar energy applications. Moreover, periodic silicon nanopost arrays are two-dimensional photonic crystal (2DPC), which presents vivid structural colors due to their specific photonic band gap. They are therefore considered to be potential candidates for building biological or chemical sensors. Furthermore, owing to the high surface area, they have been studied for use as substrates for cell adhesion and gene delivery.